Polarization Phase-Shifting Point Diffraction Interferometry for Measuring Wavefront Aberration

Peng Feng; Zhongliang Li; Xiangzhao Wang; Yang Bu; Yunjun Lu; Fudong Guo; Sikun Li

doi:10.3788/CJL202249.2104001

Chinese Journal of Lasers, Volume. 49, Issue 21, 2104001(2022)

Polarization Phase-Shifting Point Diffraction Interferometry for Measuring Wavefront Aberration

Peng Feng^1,2, Zhongliang Li^1,2、*, Xiangzhao Wang^1,2, Yang Bu^1,2, Yunjun Lu^1,2, Fudong Guo¹, and Sikun Li^1,2

¹Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

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Peng Feng, Zhongliang Li, Xiangzhao Wang, Yang Bu, Yunjun Lu, Fudong Guo, Sikun Li. Polarization Phase-Shifting Point Diffraction Interferometry for Measuring Wavefront Aberration[J]. Chinese Journal of Lasers, 2022, 49(21): 2104001

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Paper Information

Category: Measurement and metrology

Received: Dec. 28, 2021

Accepted: Mar. 11, 2022

Published Online: Nov. 9, 2022

The Author Email: Li Zhongliang (lizhongliang@siom.ac.cn)

DOI:10.3788/CJL202249.2104001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology