Design method for freeform reflective-imaging systems with low surface-figure-error sensitivity

Yuting Deng; Guofan Jin; Jun Zhu

doi:10.3788/COL201917.092201

Chinese Optics Letters, Volume. 17, Issue 9, 092201(2019)

Design method for freeform reflective-imaging systems with low surface-figure-error sensitivity

Yuting Deng, Guofan Jin, and Jun Zhu^*

State Key Laboratory of Precision Measurements Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China

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Figures & Tables(9)

Fig. 1. Optical-path-length change caused by figure errors.

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Fig. 2. Establish initial planar system.

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Fig. 3. (a) Forward ray tracing; (b) reverse ray tracing.

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Fig. 4. Shifting image points to change AOIs on the TM.

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Fig. 5. (a) Initial planar system; (b) initial freeform surfaces system; (c) freeform surfaces system with $| θ_{1} |$ greater than $w_{1}$ ; (d) freeform surfaces system, in which $| θ_{1} |$ , $| θ_{2} |$ are greater than $w_{1}$ , $w_{2}$ , respectively; (e) initial system with low surface-figure-error sensitivity, in which $| θ_{1} |$ , $| θ_{2} |$ , and $| θ_{3} |$ are greater than $w_{1}$ , $w_{2}$ , and $w_{3}$ , respectively; (f) optimized system; (g) field map of the RMSWFE.

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Fig. 6. (a) Initial planar system; (b) initial system designed by CI-3D method; (c) optimized system; (d) field map of the RMSWFE.

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Fig. 7. Sensitivity curve of the two systems to surface figure errors. (a) PM; (b) SM; (c) TM.

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Table 1. Optical System Specifications
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Table 1. Optical System Specifications
Parameter Specification
Field of view (FOV) $3 ° \times 4 °$
F-number 1.5
Focal length 100 mm
Wavelength 8–12 μm

Table 2. Absolute AOIs on Each Surface of the Systems in Fig. 5a
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Table 2. Absolute AOIs on Each Surface of the Systems in Fig. 5a
System AOI PM SM TM
(a) Min 30 25 25
(b) Min 28.34 21.66 19.25
(c) Min 30.36 22.49 19.64
(d) Min 30.36 25.46 21.60
(e) Min 30.36 25.46 25.62
(f) Min 43.58 51.75 26.27

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Yuting Deng, Guofan Jin, Jun Zhu, "Design method for freeform reflective-imaging systems with low surface-figure-error sensitivity," Chin. Opt. Lett. 17, 092201 (2019)

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