Fig. 1. Geometric diagram of calculation of non-cosine film thickness

Fig. 2. Polar coordinate diagram of instantaneous film thickness distribution

Fig. 3. Instantaneous film thickness distribution at different locations on deposition surface

Fig. 4. Computational width of corrected mask when evaporating single film

Fig. 5. Computational widths of two corrected masks

Fig. 6. Reflectivity of two films. (a) H4 monolayer film; (b) MgF₂ monolayer film

Fig. 7. Thickness distributions of two films. (a) H4 monolayer film; (b) MgF₂ monolayer film