Acta Optica Sinica, Volume. 5, Issue 2, 157(1985)
In-situ measurement of inhomogeneity for optical thin films by ellipsometry
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WU QIHOUG. In-situ measurement of inhomogeneity for optical thin films by ellipsometry[J]. Acta Optica Sinica, 1985, 5(2): 157
Category: Thin Films
Received: Mar. 2, 1984
Accepted: --
Published Online: Sep. 16, 2011
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CSTR:32186.14.