Chinese Optics, Volume. 15, Issue 2, 306(2022)
Design of optical system for quality evaluation of a large rectangular aperture laser beam
Fig. 1. Schematic diagram of evaluation system of the large rectangular aperture laser beam quality
Fig. 3. Schematic diagram of optical structure of main beam compression system
Fig. 4. Curves of tangential and sagittal curvature of aspheric surfaces
Fig. 5. Image quality evaluation results of the main beam compression system
Fig. 6. Wavefront aberration of the beam quality detection subsystem
Fig. 9. Evaluation results of the image quality of the beam quality detection system
Fig. 10. Wavefront aberration of the beam uniformity detection subsystem
Fig. 12. 2D diagram of the beam uniformity detection system with an ideal lens
Fig. 13. Evaluation of the image quality of the beam uniformity detection system
Fig. 14. Beam quality evaluation system of the large rectangular aperture near-infrared laser
Table 1. The technical specifications of the laser beam quality evaluation system
View tableView in ArticleTable 1. The technical specifications of the laser beam quality evaluation system
参数 数值 主缩束装置倍率 11× 主缩束系统通光口径 160 mm×120 mm 视场 ±3′ 波长 (1064±0.3) nm 主缩束入瞳位置 500 mm 主缩束出瞳位置 ≥40 mm 主缩束系统筒长 ≤320 mm 主缩束系统配合光束质量 探测光学系统EFFL 5500 mm 光束均匀性探测光学系统 缩束倍率 4.5× 光束质量β因子 ≤1.3×DL 系统整体尺寸 350 mm×180 mm×220 mm (长×宽×高)
Table 2. Lens data of the main beam compression system
View tableView in ArticleTable 2. Lens data of the main beam compression system
Type Radius Thickness Glass Even Asphere 440.000 22.893 H-ZLAF52A Standard −2924.268 1.000 − Standard 231.431 28.018 H-ZLAF55D Standard 925.079 56.403 − Standard 394.602 10.800 H-ZF73 Standard 64.282 30.000 H-ZLAF68C Standard 191.455 154.885 − Standard −13.435 2.009 H-ZLAF55D Standard −1053.154 4.077 − Standard −20.488 4.037 H-ZLAF53B Standard −13.485 0.811 − Standard 311.182 4.496 H-ZLAF53B Standard −25.212 41.405 −
Table 3. Lens data of beam quality detection subsystem
View tableView in ArticleTable 3. Lens data of beam quality detection subsystem
Radius Thickness Glass 36.523 7.047 H-ZLA 415.691 20.267 — −38.384 8.628 H-ZF88 155.064 38.737 — −124.904 5.558 H-ZLA 12.285 45.272 —
Table 4. Tolerance data of beam quality detection system
View tableView in ArticleTable 4. Tolerance data of beam quality detection system
No. Radius Thickness/mm Decenter (X/Y)/mm Tilt (X/Y)/(′) Index Abbe. Len1 ±0.02 ±0.025 ±0.01 ±0.7 ±0.0005 ±0.08% Len2 ±0.02 ±0.025 ±0.01 ±0.6 ±0.0005 ±0.08% Len3 ±0.02 ±0.025 ±0.01 ±0.7 ±0.0005 ±0.08% Len4 ±0.03 ±0.025 ±0.03 ±0.1 ±0.002 ±0.2% Len5 ±0.03 ±0.0375 ±0.01 ±1.5 ±0.002 ±0.2% Len6 ±0.03 ±0.0375 ±0.02 ±1.5 ±0.002 ±0.2% Len7 ±0.03 ±0.0375 ±0.02 ±2 ±0.002 ±0.3% Len8 ±0.03 ±0.0375 ±0.02 ±2 ±0.002 ±0.3% Len9 ±0.03 ±0.0375 ±0.02 ±2 ±0.002 ±0.3%
Table 5. 1000 Monte Carlo statistical analysis results of the beam quality detection system
View tableView in ArticleTable 5. 1000 Monte Carlo statistical analysis results of the beam quality detection system
Percentage of Monte Carlo/% RMS Wavefront 98 0.2715 90 0.1871 80 0.1586 50 0.1109
Table 6. Lens data of the beam uniformity detection subsystem
View tableView in ArticleTable 6. Lens data of the beam uniformity detection subsystem
Radius Thickness Glass 66.752 3.964 H-ZF7LA Infinity 0.800 − −154.456 6.000 H-ZF7LAGT −340.621 117.358 − −5.693 3.326 H-K9L −7.277 1.000 − −23.127 3.893 H-ZLAF68N −10.385 3.000 − −6.247 3.950 H-K9L −6.247 26.932 −
Table 7. Tolerance data of the beam uniformity detection system
View tableView in ArticleTable 7. Tolerance data of the beam uniformity detection system
No. Radius Thickness Decenter (X/Y)/mm Tilt (X/Y)/(′) Index Abbe. Len1 ±0.02 ±0.025 mm ±0.01 ±0.8 ±0.0005 ±0.08% Len2 ±0.02 ±0.025 mm ±0.01 ±0.6 ±0.0005 ±0.08% Len3 ±0.02 ±0.025 mm ±0.01 ±0.8 ±0.0005 ±0.08% Len4 ±0.03 ±0.035 mm ±0.03 ±1.5 ±0.0005 ±0.2% Len5 ±0.03 ±0.035 mm ±0.01 ±1.5 ±0.003 ±0.2% Len6 ±0.03 ±0.035 mm ±0.03 ±1.5 ±0.003 ±0.2% Len7 ±0.03 ±0.035 mm ±0.03 ±3.0 ±0.001 ±0.2% Len8 ±0.03 ±0.035 mm ±0.03 ±3.0 ±0.003 ±0.2% Len9 ±0.03 ±0.035 mm ±0.03 ±3.0 ±0.003 ±0.2% Len10 ±0.03 ±0.035 mm ±0.03 ±3.0 ±0.003 ±0.2% Len11 ±0.03 ±0.035 mm ±0.03 ±3.0 ±0.003 ±0.2%
Table 8. 1000 Monte Carlo statistical analysis results of the beam uniformity detection system
View tableView in ArticleTable 8. 1000 Monte Carlo statistical analysis results of the beam uniformity detection system
Percentage of Monte Carlo RMS Wavefront 98% 0.2403 90% 0.1874 80% 0.1625 50% 0.1189
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Guo-tao PAN, Yu-feng YAN, Xin YU, Lei ZHANG, Kuo SUN, Su-ping BAI, Hong-shen SUN. Design of optical system for quality evaluation of a large rectangular aperture laser beam[J]. Chinese Optics, 2022, 15(2): 306
Category: Original Article
Received: Jun. 26, 2021
Accepted: --
Published Online: Mar. 28, 2022
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