Journal of Synthetic Crystals, Volume. 49, Issue 7, 1168(2020)
Influence of Inlet Structure of Planetary Reactor on Gas Reaction Path and Growth Rate in AlN-MOCVD
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MAO Yanlin, ZUO Ran. Influence of Inlet Structure of Planetary Reactor on Gas Reaction Path and Growth Rate in AlN-MOCVD[J]. Journal of Synthetic Crystals, 2020, 49(7): 1168
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Received: --
Accepted: --
Published Online: Aug. 18, 2020
The Author Email: MAO Yanlin (491511082@qq.com)
CSTR:32186.14.
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