International Journal of Extreme Manufacturing, Volume. 1, Issue 1, 12003(2019)

Hybrid femtosecond laser three-dimensional micro-and nanoprocessing: a review

Koji Sugiok*
Author Affiliations
  • RIKEN Center for Advanced Photonics, Wako, Saitama 351-0198, Japan
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    Koji Sugiok. Hybrid femtosecond laser three-dimensional micro-and nanoprocessing: a review[J]. International Journal of Extreme Manufacturing, 2019, 1(1): 12003

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    Paper Information

    Category: Topical Review

    Received: Mar. 12, 2019

    Accepted: --

    Published Online: Jun. 4, 2020

    The Author Email: Koji Sugiok (ksugioka@riken.jp)

    DOI:10.1088/2631-7990/ab0eda

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