Fig. 1. Three-dimensional cross-sectional schematic of SPAD

Fig. 2. Simulated I-V curve of SPAD

Fig. 3. Device simulation results of TCAD. (a) Electric field distribution; (b) impact ionization distribution; (c) current density distribution; (d) photon absorption rate

Fig. 4. Light generation and absorption rate distribution of SPAD device

Fig. 5. Microscope and layout images of device. (a) Microscope image; (b) layout image

Fig. 6. Test platform of SPAD. (a) Schematic of passive quenching circuit; (b) test platform of passive quenching circuit

Fig. 7. I-V characteristic test curve of SPAD

Fig. 8. PDP test results of SPAD device

Fig. 9. Dark count rate (DCR) of SPAD device

Fig. 10. Schematic diagram of mixed simulation model

Fig. 11. Pulse curve simulated by SPAD model

Fig. 12. Measured curve and model simulation curve of SPAD