Fig. 1. Schematic diagram of LSI process. (a) Whole process diagram; (b) three-dimensional topography of micro-mold after first laser marking; (c) three-dimensional topography of micro-mold after second laser marking; (d) three-dimensional topography of workpiece surface after LSI

Fig. 2. SEM images of micro-mold surface after the first marking

Fig. 3. SEM images of groove microtexture on the surface of micro-mold after the second marking

Fig. 4. SEM images of workpiece forming surface under different shock times

Fig. 5. Variation of forming depth of workpiece forming surface under different numbers of shock times

Fig. 6. Variation of static contact angle of workpiece under different numbers of shock times

Fig. 7. Schematic diagram of workpiece surface wettability under different numbers of shock times. (a) Number of shock times is 1; (b) number of shock times is 7

Fig. 8. Forming effect of groove on workpiece surface under different soft film thicknesses. (a) Schematic diagram of groove selection; (b) variation of forming depth

Fig. 9. Variation of static contact angle of workpiece under different soft film thicknesses

Fig. 10. SEM images of workpiece forming surface under different soft film thicknesses

Fig. 11. Variation of contact angle of hydrophobic surface of workpiece with time in different chemical environments

Fig. 12. SEM images of hydrophobic surface of workpiece on the 1st, 3rd, 7th, 14th, and 21st days in NaCl solution

Fig. 13. SEM images of groove microtexture on the workpiece surface on the 21st day in air and water