Fig. 1. Absorption spectra of Pr³⁺∶LiYF₄ crystal

Fig. 2. Curve of LD wavelength changing with power

Fig. 3. Polarization-dependent emission cross section of a Pr³⁺∶LiYF₄ crystal (the inset shows the details of the investigated emission spectrum)

Fig. 4. All solid state single longitudinal mode 273 nm DUV laser

Fig. 5. Stability analysis of resonant cavity. (a) Simulation of beam waist radius in the resonant cavity; (b) simulation of stability map in the resonant cavity

Fig. 6. Transmittance of F-P etalon. (a) Combined transmittance of two F-P etalons in the range of 0.25 nm; (b) combined transmittance of two F-P etalons in the range of 0.02 nm

Fig. 7. Test diagram of wavelength and linewidth

Fig. 8. Test diagram of wavelength stability in 2 h

Fig. 9. Output power characteristic of single longitudinal mode 273 nm deep UV laser & power stability of 273 nm laser in 1 h

Fig. 10. 273 nm laser transverse mode characteristic photos. (a) Laser beam; (b) measured beam quality factor M²