[1] [1] Dai Yutang, Xu Gang, Tong Xinlin. Deep UV laser etching of GaN epilayers grown on sapphire substrate［J］. J. Mater. Process. Technol., 2012, 212(2): 492～496

[2] [2] Tang Wanyi, Zhou Ming, Ren Naifei et al.. Surface morphology and optical absorption of femtosecond laser microstructured silicon coated with AZO film［J］. Chinese J. Lasers, 2011, 38(12): 1207001

[3] [3] P. Moreno, C. Mendez, A. Garcia et al.. Femtosecond laser ablation of carbon reinforced polymers［J］. Appl. Surf. Sci., 2006, 252(12): 4110～4119

[4] [4] S. Gloora, W. Lüthya, H. P. Webera et al.. UV laser polishing of thick diamond films for IR windows［J］. Appl. Surf. Sci., 1999, 138(1): 135～139

[5] [5] Xu Xuefeng, Guo Quan, Huang Yishen et al.. Chemical mechanical polishing using magnetic composite abrasives slurry and experimental study on polishing performance［J］. Chinese J. Mechanical Engineering, 2011, 47(21): 186～192

[6] [6] V. C. Venkatesh, S. Lzman. Development of a novel binderless diamond grinding wheel for machining IC chips for failure analysis［ J］. J. Mater. Process. Technol., 2007, 185(1-3): 31～37

[7] [7] Zhang Feng, Deng Weijie. Magnetic-medium assistant polishing of silicon modification layer on silicon carbide surface［J］. Acta Optica Sinica, 2012, 32(11): 116001

[8] [8] Dai Yifan, Shi Feng, Peng Xiaoqiang et al.. Deterministic figuring in optical machining by magnetorheological finishing［J］. Acta Optica Sinica, 2010, 30(1): 198～205

[9] [9] J. L. Weyher, S. Müllera, I. Grzegoryb et al.. Chemical polishing of bulk and epitaxial GaN［J］. J. Cryst. Growth, 1997, 182(1-2): 17～22

[10] [10] Zhang Fenglie, Fu Xing, Liu Chunyang. Influences of nanosecond pulsed laser on parameters in micro-polishing of stainless steel 316L［J］. Nanotechnology and Precision Engineering, 2011, 9(7): 370～376

[11] [11] M. Vadali, C. Ma, N. A. Duffie et al.. Pulsed laser micro polishing: surface prediction model［J］. J. Manufacturing Processes, 2012, 14(3): 307～315

[12] [12] Yuan Julong, Wang Zhiwei, Wen Donghui et al.. Review of the current situation of ultra-precision machining［J］. Chinese J. Mechanical Engineering, 2007, 43(1): 35～48