Acta Optica Sinica, Volume. 28, Issue 5, 1007(2008)
Influence of Deposition Temperature on Residual Stress of Yttria-Stabilized Zirconia Thin Films
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Xiao Qiling, He Hongbo, Shao Shuying, Shao Jianda, Fan Zhengxiu. Influence of Deposition Temperature on Residual Stress of Yttria-Stabilized Zirconia Thin Films[J]. Acta Optica Sinica, 2008, 28(5): 1007
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