Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses

Guangming Zhang; Xin Li; Lan Jiang; Xuesong Shi; Kaihu Zhang; Qiang Cao; Yongfeng Lu

doi:10.3788/COL201513.041402

Chinese Optics Letters, Volume. 13, Issue 4, 041402(2015)

Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses

Guangming Zhang¹, Xin Li^1、*, Lan Jiang¹, Xuesong Shi¹, Kaihu Zhang¹, Qiang Cao¹, and Yongfeng Lu²

¹Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China

²Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0511, USA

show less

Cited By

Article index updated: Feb. 24, 2023

Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.

The article is cited by 3 article(s) from Web of Science.

Tools

Get Citation

Copy Citation Text

Guangming Zhang, Xin Li, Lan Jiang, Xuesong Shi, Kaihu Zhang, Qiang Cao, Yongfeng Lu, "Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses," Chin. Opt. Lett. 13, 041402 (2015)

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Lasers and Laser Optics

Received: Dec. 5, 2014

Accepted: Jan. 16, 2015

Published Online: Sep. 21, 2018

The Author Email: Xin Li (lixin02@bit.edu.cn)

DOI:10.3788/COL201513.041402

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology