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Frontiers of Optoelectronics, Volume. 14, Issue 4, 507(2021)

Growth of InGaN-based blue-LED on AlN/sapphire sputtered with different oxygen flow rate

Jiahui HU, Feng WU, Jiangnan DAI, and Changqing CHEN*
Author Affiliations
  • Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
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    Jiahui HU, Feng WU, Jiangnan DAI, Changqing CHEN. Growth of InGaN-based blue-LED on AlN/sapphire sputtered with different oxygen flow rate[J]. Frontiers of Optoelectronics, 2021, 14(4): 507

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    Paper Information

    Category: RESEARCH ARTICLE

    Received: Mar. 20, 2021

    Accepted: Apr. 1, 2021

    Published Online: Jan. 10, 2022

    The Author Email: Changqing CHEN (cqchen@hust.edu.cn)

    DOI:10.1007/s12200-021-1216-2

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology