Pulsed DC magnetron sputtering of transparent conductive oxide layers

Astrid Bingel; Kevin Fuchsel; Norbert Kaiser; Andreas Tunnermann

doi:10.3788/col201311.s10201

Chinese Optics Letters, Volume. 11, Issue s1, S10201(2013)

Pulsed DC magnetron sputtering of transparent conductive oxide layers

Astrid Bingel... Kevin Fuchsel, Norbert Kaiser and Andreas Tunnermann |Show fewer author(s)

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References(20)

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Cited By

[1] K.P. Sibin, Niharika Swain, Prasanta Chowdhury, Arjun Dey, N. Sridhara, H.D. Shashikala, Anand Kumar Sharma, Harish C. Barshilia.

[1] Niharika Swain, Prasanta Chowdhury, Arjun Dey, N. Sridhara, H.D. Shashikala, Anand Kumar Sharma, Harish C. Barshilia.

[1] K.P. Sibin, Niharika Swain, Prasanta Chowdhury, Arjun Dey, N. Sridhara, H.D. Shashikala, Anand Kumar Sharma, Harish C. Barshilia.

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Astrid Bingel, Kevin Fuchsel, Norbert Kaiser, Andreas Tunnermann, "Pulsed DC magnetron sputtering of transparent conductive oxide layers," Chin. Opt. Lett. 11, S10201 (2013)

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Paper Information

Category: Deposition and process control

Received: Dec. 10, 2012

Accepted: Dec. 26, 2012

Published Online: May. 30, 2013

The Author Email:

DOI:10.3788/col201311.s10201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

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