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Opto-Electronic Engineering, Volume. 38, Issue 5, 35(2011)

Planar Hyper Lens with Demagnification for Nanolithography

LI Heng-yi1,2、*, WANG Chang-tao1, and LUO Xian-gang1
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  • 1[in Chinese]
  • 2[in Chinese]
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    LI Heng-yi, WANG Chang-tao, LUO Xian-gang. Planar Hyper Lens with Demagnification for Nanolithography[J]. Opto-Electronic Engineering, 2011, 38(5): 35

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    Paper Information

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    Received: Dec. 8, 2010

    Accepted: --

    Published Online: May. 13, 2011

    The Author Email: Heng-yi LI (sklotm@ioe.ac.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology