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Laser & Optoelectronics Progress, Volume. 54, Issue 10, 101404(2017)

Water-Assisted Laser Induced Plasma Backside Etching of Pyrex7740 Glass

Sun Shufeng1,2、* and Shao Yong1
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    Sun Shufeng, Shao Yong. Water-Assisted Laser Induced Plasma Backside Etching of Pyrex7740 Glass[J]. Laser & Optoelectronics Progress, 2017, 54(10): 101404

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    Paper Information

    Category: Lasers and Laser Optics

    Received: May. 4, 2017

    Accepted: --

    Published Online: Oct. 9, 2017

    The Author Email: Sun Shufeng (shufeng2001@163.com)

    DOI:10.3788/lop54.101404

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology