Acta Optica Sinica, Volume. 39, Issue 3, 0305001(2019)
Optimal Design for Multi-Layer Diffractive Optical Elements with Antireflection Films
Figures & Tables(11)
Fig. 1. Typical separate double-layer diffractive optical elements. (a) Optical microstructure; (b) light transmission path
Fig. 2. MLDOEs with antireflection films. (a) Physical structure of antireflection films; (b) optical microstructure
Fig. 3. Calculated diffraction efficiency of MLDOEs with traditional method. (a) Theoretical diffraction efficiency; (b) actual diffraction efficiency
Fig. 4. Relationship between incident angle and calculated PIDE of MLDOEs by traditional method
Fig. 5. Calculated diffraction efficiency of MLDOEs with antireflection coatings with traditional method
Fig. 6. Calculated diffraction efficiency of MLDOEs with optimal method. (a) Effect of incident wavelength on diffraction efficiency at continuous incident angles; (b) effect of incident wavelength on diffraction efficiency at two incident angles
Table 1. Film system parameters of antireflection films for MLDOEs
View tableTable 1. Film system parameters of antireflection films for MLDOEs
Substrate material Film material Thickness /nm PMMA (substrate 1) SiO2 91.77 ZrO2 10.00 SiO2 48.75 ZrO2 44.78 SiO2 10.00 ZrO2 67.63 SiO2 86.98 Polycarb (PC) (substrate 2) SiO2 22.46 Ta2O5 18.61 SiO2 30.09 Ta2O5 57.94 SiO2 10.00 Ta2O5 41.02 SiO2 88.96
Table 2. Calculated heights of surface microstructure of MLDOEs
View tableTable 2. Calculated heights of surface microstructure of MLDOEs
Microstructure height /μm Traditional method Optimal method PMMA Polycarb PMMA Polycarb H 116.462 16.091 H 2-12.815 -12.661
Table 3. Calculated diffraction efficiency of MLDOEs with traditional method
View tableTable 3. Calculated diffraction efficiency of MLDOEs with traditional method
Wavelength /μm Diffraction efficiency /% Theoretical values Actual values Incident angle of 0° Incident angle of 10° Incident angle of 0° Incident angle of 10° 0.400 94.845 98.350 96.508 92.935 0.435 99.996 99.094 86.146 79.045 0.450 99.770 98.001 83.604 76.291 0.550 99.578 97.918 87.123 81.425 0.598 100 99.456 92.459 88.135 0.650 99.301 99.977 96.032 94.274 0.700 97.277 99.969 99.473 98.140
Table 4. Calculated diffraction efficiency of MLDOEs at some specific wavelengths with optimal method
View tableTable 4. Calculated diffraction efficiency of MLDOEs at some specific wavelengths with optimal method
Wavelength /μm Diffraction efficiency /% Incident angle of 0° Incident angle of 10° 0.400 94.855 98.076 0.435 100 99.280 0.450 99.775 98.276 0.550 99.588 98.147 0.598 100 99.560 0.650 99.296 99.950 0.700 97.273 98.845
Table 5. PIDE of MLDOEs for two design methods
View tableTable 5. PIDE of MLDOEs for two design methods
Incident angle /(°) PIDE /% Traditional method Optimal method Theoretical value Actual value 0 99.252 89.893 99.257 5 99.213 88.741 99.220 10 98.597 84.806 98.730
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Shan Mao, Jianlin Zhao. Optimal Design for Multi-Layer Diffractive Optical Elements with Antireflection Films[J]. Acta Optica Sinica, 2019, 39(3): 0305001
Paper Information
Category: Diffraction and Gratings
Received: Oct. 8, 2018
Accepted: Oct. 30, 2018
Published Online: May. 10, 2019
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