Journal of Inorganic Materials, Volume. 40, Issue 2, 196(2025)
Figures & Tables(14)
1. Schematic diagram of sample locations for wafer Li content testing
2. 4-inch (100 nm) Z -cut LN wafers obtained from VTE experiments 1-6
3. Schematic diagram of experimental device for the 4th VTE experiment
4. 6-inch (153 nm) Z -cut nSLN wafer obtained from the 7th VTE experiment (VTE-7)
6. Birefringence changes in the twinning regions of wafers VTE-3-Z and VTE-3-X rotated at different angles within 180°
7. Direction of the twinned lamella on the Z -cut wafer after VTE process
8. X-ray diffraction pattern of the twinning plane within the wafer VTE-1-1
9. Cracks at crossing of twins on Z -cut wafers before and after polishing
10. Direction of the twinned lamella on the X -cut wafer after VTE process
11. Slip of niobium atoms (or lithium atoms) during twinning deformation of LN crystal
Table 1. Results of crystals diffusion under different conditions
View tableView in ArticleTable 1. Results of crystals diffusion under different conditions
Experiment Sample Crystal Diffusion treatment condition Results Orientation Size/mm Temperature/℃ Time/h Wafer placement 1 VTE-1-1 Z-cut ϕ100×0.86 1100 120 Horizontal Cracked, twins VTE-1-2 2 VTE-2-1 Z-cut ϕ100×0.86 1100 120 Vertical Uncracked, twins VTE-2-2 3 VTE-3-Z Z-cut ϕ100×1.02 1100 300 Vertical Uncracked, twins VTE-3-X X-cut ϕ76.2×0.50 4 VTE-4-1 Z-cut ϕ100×0.86 1100 120 Vertical Uncracked, twins VTE-4-2 5 VTE-5-1 Z-cut ϕ100×0.86 1100 120 Vertical Uncracked, twins VTE-5-2 Uncracked, without twins 6 VTE-6-1 Z-cut ϕ100×0.86 1100 120 Horizontal Uncracked, without twins VTE-6-2 7 VTE-7 Z-cut ϕ153×1.02 1100 120 Horizontal Uncracked, without twins
Table 2. Curie temperatures (TC) and Li contents (CLi) of different wafers
View tableView in ArticleTable 2. Curie temperatures (TC) and Li contents (CLi) of different wafers
Sample TC/℃ Average of TC/℃ CLi/% (in mole) VTE-5-2 1 1200 1200.2 49.94 2 1201 3 1200 4 1201 5 1199 VTE-6-1 1 1202 1201.6 49.98 2 1201 3 1202 4 1201 5 1202 VTE-7 1 1202 1201.0 49.96 2 1201 3 1200 4 1201 5 1201
Table 3. Angles between families of crystal planes and (0001) plane of LN crystal[22]
View tableView in ArticleTable 3. Angles between families of crystal planes and (0001) plane of LN crystal[22]
Family of LN crystal planes Angle Family of LN crystal planes Angle 90° 90° 72°10′ 74°26′ 37°52′ 57°15′ 60°53′ 21°14′ 41°55′ 80°52′
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Yongxin HAO, Jun SUN, Jinfeng YANG, Chencheng ZHAO, Ziqi LIU, Qinglian LI, Jingjun XU.
Paper Information
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Received: Jul. 19, 2024
Accepted: --
Published Online: Apr. 24, 2025
The Author Email: Jun SUN (sunjun@nankai.edu.cn)
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