[5] [5] Sasnett M. Propagation of multimode laser beams-theM2 factor[M]. CRC Press, 2020: 132-142.

[6] [6] M CM, Teboho B, Nokwazi M, et al. Beam quality factor of aberrated Laguerre-Gaussian optical beams[J]. Optics Express, 2023, 31(16).

[10] [10] Seurinjf, Zhoud, Xu G, et al. High-efficiency VCSEL arrays for illumination and sensing in consumer applications[C]//Vertical-Cavity Surface-Emitting Lasers XX, International Society for Optics and Photonics, 2016, 9766: 97660D.

[11] [11] Chen B, Claus D, Rrss D, et al. Generation of a high-resolution 3D-printed freeform collimator for VCSEL-based 3D-depth sensing[J]. Optics Letters, 2020, 45(19): 5583-5586.

[12] [12] Arshad M K, Noor M M, Manaf A A, et al. Packaging design and thermal analysis for 1 mm2 high power VCSEL[J]. Microelectronics International, 2023, 40(1).

[17] [17] UNE-EN ISO 11146-1-2021 Lasers and laser-related equipment-test methods for laser beam widths, divergence angles and beam propagation ratios-part 1: stigmatic and simple astigmatic beams[S]. ISO 11146-1, 2021.

[19] [19] Fei Xiang, Lin Zhang, Tao Chen, et al. Transverse propagation characteristics and coherent effect of Gaussian beams[J]. Chinese Physics Letters, 2020, 37(6): 21-25.

[20] [20] BSPD ISO/TR 11146-3-2004. Lasers and laser-related equipment. test methods for laser beam widths, divergence anglesand beam propagation ratios. Intrinsic and geometrical laser beam classification, propagation and details of test methods[S]. ISO 11146-3, 2004.