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Chinese Journal of Lasers, Volume. 49, Issue 17, 1703101(2022)

Research on Conductive Filter Film for Vehicle-Mounted Lidar

Xiuhua Fu1,2, Xingyu Chen1、*, Chengqi Tan1, Zhongyao Zhu3, Jing Zhang1, Gong Zhang1, Zhongju Ren1, and Guoshui Ma4
Author Affiliations
  • 1School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin, China
  • 2Zhongshan Institute, Changchun University of Science and Technology, Zhongshan 528400, Guangdong, China
  • 3Beijing Institute of Space Mechatronics, Beijing 100049, China
  • 4Optorun (Shanghai) Co., Ltd., Shanghai 200444, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (14)
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    References (13)
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    Figures & Tables(14)
    Refractive indexes of SiHx at different hydrogen flow rates

    Fig. 1. Refractive indexes of SiHx at different hydrogen flow rates

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    Extinction coefficients of SiHx at different hydrogen flow rates

    Fig. 2. Extinction coefficients of SiHx at different hydrogen flow rates

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    Spectra of designed films. (a) Transmittance spectra; (b) reflectance spectra

    Fig. 3. Spectra of designed films. (a) Transmittance spectra; (b) reflectance spectra

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    Material error analysis

    Fig. 4. Material error analysis

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    Spectra of filter coating under different incident angles. (a) 0°；(b) 15°；(b) 30°

    Fig. 5. Spectra of filter coating under different incident angles. (a) 0°；(b) 15°；(b) 30°

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    Square resistances of ITO films with different thicknesses

    Fig. 6. Square resistances of ITO films with different thicknesses

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    Optical constants of ITO. (a) Refractive index; (b) extinction coefficient

    Fig. 7. Optical constants of ITO. (a) Refractive index; (b) extinction coefficient

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    Spectra of filter coating after plating ITO. (a) Transmittance spectra; (b) reflectance spectra

    Fig. 8. Spectra of filter coating after plating ITO. (a) Transmittance spectra; (b) reflectance spectra

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    Measurement results of spectral drifts

    Fig. 9. Measurement results of spectral drifts

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    Hundred-grid result under microscope

    Fig. 10. Hundred-grid result under microscope

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    • Table 1. Process parameters for filter coating

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      Table 1. Process parameters for filter coating

      MaterialTG2TG3/4ICP×2Vacuum /Pa
      TG power /kWFlow rate of Ar /(mL·min－1)TG power /kWFlow rate of Ar /(mL·min－1)ICP power /kWFlow rate of Ar /(mL·min－1)Flow rate of O2/(mL·min－1)Flow rate of H2/(mL·min－1)
      SiO2－10010100310080－3.53×10－1
      SiHx－100101003100－1203.89×10－1

    • Table 2. Square resistances of ITO films at different oxygen flow rates

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      Table 2. Square resistances of ITO films at different oxygen flow rates

      Flow rate of O2/(mL·min－1)Square resistance /(Ω·square－1)
      1019.7
      2021.5
      3024.2
      4034.8

    • Table 3. Square resistances of ITOs when argon gases with different flow rates are filled into target

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      Table 3. Square resistances of ITOs when argon gases with different flow rates are filled into target

      Flow rate of Ar /(mL·min－1)Square resistance /(Ω·square－1)
      5032.6
      8027.0
      12024.5
      15028.0

    • Table 4. ITO preparation process parameters

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      Table 4. ITO preparation process parameters

      MaterialTG2TG3/4ICP×2Vacuum /Pa
      TG power /kWFlow rate of Ar /(mL·min－1)TG power /kWFlow rate of Ar /(mL·min－1)ICP power /kWFlow rate of Ar /(mL·min－1)Flow rate of O2/(mL·min－1)Flow rate of H2/(mL·min－1)
      ITO10120－120230030－6.37×10－1
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    Xiuhua Fu, Xingyu Chen, Chengqi Tan, Zhongyao Zhu, Jing Zhang, Gong Zhang, Zhongju Ren, Guoshui Ma. Research on Conductive Filter Film for Vehicle-Mounted Lidar[J]. Chinese Journal of Lasers, 2022, 49(17): 1703101

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    Paper Information

    Category: Thin Films

    Received: Dec. 8, 2021

    Accepted: Dec. 30, 2021

    Published Online: Jul. 28, 2022

    The Author Email: Chen Xingyu (c44181418@163.com)

    DOI:10.3788/CJL202249.1703101

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology