Design and Simulation of MEMS Thermopile Infrared Detector with Integrated Metasurface

SHAO Boyou; WANG Kai; LEI Cheng; GONG Mingfeng; JI Diyang; ZHANG Zhenyu; GUO Jinzhu; LIANG Ting

doi:10.16818/j.issn1001-5868.20240601001

Semiconductor Optoelectronics, Volume. 46, Issue 2, 284(2025)

Design and Simulation of MEMS Thermopile Infrared Detector with Integrated Metasurface

SHAO Boyou¹, WANG Kai², LEI Cheng¹, GONG Mingfeng¹, JI Diyang¹, ZHANG Zhenyu¹, GUO Jinzhu³, and LIANG Ting¹

Author Affiliations

¹State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, CHN

²Tianjin Weijia Environmental Technology Co., Ltd., Tianjin 300450, CHN

³CETC Fenghua Information Equipment Co., Ltd., Taiyuan 030062, CHN

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SHAO Boyou, WANG Kai, LEI Cheng, GONG Mingfeng, JI Diyang, ZHANG Zhenyu, GUO Jinzhu, LIANG Ting. Design and Simulation of MEMS Thermopile Infrared Detector with Integrated Metasurface[J]. Semiconductor Optoelectronics, 2025, 46(2): 284

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Paper Information

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Received: Jun. 1, 2024

Accepted: Sep. 18, 2025

Published Online: Sep. 18, 2025

The Author Email:

DOI:10.16818/j.issn1001-5868.20240601001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology