Semiconductor Optoelectronics, Volume. 46, Issue 2, 284(2025)

Design and Simulation of MEMS Thermopile Infrared Detector with Integrated Metasurface

SHAO Boyou1, WANG Kai2, LEI Cheng1, GONG Mingfeng1, JI Diyang1, ZHANG Zhenyu1, GUO Jinzhu3, and LIANG Ting1
Author Affiliations
  • 1State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, CHN
  • 2Tianjin Weijia Environmental Technology Co., Ltd., Tianjin 300450, CHN
  • 3CETC Fenghua Information Equipment Co., Ltd., Taiyuan 030062, CHN
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    Microelectromechanical system thermopile infrared detectors are an important infrared detection technology that is widely used in diverse fields. Owing to the continuous development of infrared technology and the increasing demand for its applications, the performance index for thermopile infrared detectors has increased. A thermopile structure with an integrated super-surface structure in the absorption region is designed to increase the absorption rate of infrared light from 9 to 11 μm to about 70%. Additionally, the thermocouple strip is designed as a quadrilateral structure with a narrow hot end and a wide cold end, which allows the hot end to extend to the temperature-concentration region, thus reducing the internal resistance. Finite-element simulation software is used to simulate the structure, and the results show that the response voltage of the detector after integrating the super-surface can reach 37.876 mV. Meanwhile, the response and detection rates are calculated to be 41.9 V/W and 1.97×108 cm·Hz1/2·W−1, respectively, with performance enhancement by 38.9%, 38.7%, and 39.7% recorded.

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    SHAO Boyou, WANG Kai, LEI Cheng, GONG Mingfeng, JI Diyang, ZHANG Zhenyu, GUO Jinzhu, LIANG Ting. Design and Simulation of MEMS Thermopile Infrared Detector with Integrated Metasurface[J]. Semiconductor Optoelectronics, 2025, 46(2): 284

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    Paper Information

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    Received: Jun. 1, 2024

    Accepted: Sep. 18, 2025

    Published Online: Sep. 18, 2025

    The Author Email:

    DOI:10.16818/j.issn1001-5868.20240601001

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