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Chinese Journal of Lasers, Volume. 41, Issue 9, 916002(2014)

Pupil Non-Balance Calibration for Lithographic Lens

Rui Dawei*, Shi Zhenguang, Yuan Wenquan, and Zhang Wei
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    Article index updated: Mar. 10, 2025

    The article is cited by 7 article(s) CLP online library. (Some content might be in Chinese.)
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    Rui Dawei, Shi Zhenguang, Yuan Wenquan, Zhang Wei. Pupil Non-Balance Calibration for Lithographic Lens[J]. Chinese Journal of Lasers, 2014, 41(9): 916002

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jun. 9, 2014

    Accepted: --

    Published Online: Aug. 12, 2014

    The Author Email: Dawei Rui (davyray@163.com)

    DOI:10.3788/cjl201441.0916002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology