Chinese Journal of Lasers, Volume. 41, Issue 9, 916002(2014)

Pupil Non-Balance Calibration for Lithographic Lens

Rui Dawei*, Shi Zhenguang, Yuan Wenquan, and Zhang Wei
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  • [in Chinese]
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    As one of the critical target of lithographic lens, pupil non-balance is modulated by many factors. It is necessary to distinguish the respective contribution of those factors. In this paper, a method is introduced to calibrate pupil balance by removing telecentriciy, and a comparison is made with another approach based on finding centroid. A user defined program, which is written in Matlab with the function of manipulating Code V and LightTools data, is consequently made up to implement the above technique and calculate the real position of pupil intensity in angular plane without telecentircity. Beside, a series of simulation on an optimally designed lithographic lens under off-axis illumination is given to show the verification. It is revealed that this method is functional in calibrating pupil non-balance with a high level of implement efficiency.

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    Rui Dawei, Shi Zhenguang, Yuan Wenquan, Zhang Wei. Pupil Non-Balance Calibration for Lithographic Lens[J]. Chinese Journal of Lasers, 2014, 41(9): 916002

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jun. 9, 2014

    Accepted: --

    Published Online: Aug. 12, 2014

    The Author Email: Dawei Rui (davyray@163.com)

    DOI:10.3788/cjl201441.0916002

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