Infrared and Laser Engineering, Volume. 44, Issue 4, 1335(2015)

Effect of Si barrier layers on the thermal stability of Al(1 wt.%Si)/Zr multilayers designed as EUV mirrors

Li Jia*, Zhu Jie, Zhang Zhong, Qi Runze, Zhong Qi, and Wang Zhanshan
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    Li Jia, Zhu Jie, Zhang Zhong, Qi Runze, Zhong Qi, Wang Zhanshan. Effect of Si barrier layers on the thermal stability of Al(1 wt.%Si)/Zr multilayers designed as EUV mirrors[J]. Infrared and Laser Engineering, 2015, 44(4): 1335

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    Paper Information

    Category: 光电器件与材料

    Received: Aug. 11, 2014

    Accepted: Sep. 15, 2014

    Published Online: Jan. 26, 2016

    The Author Email: Jia Li (freya.lijia@foxmail.com)

    DOI:

    CSTR:32186.14.

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