Infrared and Laser Engineering, Volume. 44, Issue 4, 1335(2015)
Effect of Si barrier layers on the thermal stability of Al(1 wt.%Si)/Zr multilayers designed as EUV mirrors
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Li Jia, Zhu Jie, Zhang Zhong, Qi Runze, Zhong Qi, Wang Zhanshan. Effect of Si barrier layers on the thermal stability of Al(1 wt.%Si)/Zr multilayers designed as EUV mirrors[J]. Infrared and Laser Engineering, 2015, 44(4): 1335
Category: 光电器件与材料
Received: Aug. 11, 2014
Accepted: Sep. 15, 2014
Published Online: Jan. 26, 2016
The Author Email: Jia Li (freya.lijia@foxmail.com)
CSTR:32186.14.