Frontiers of Optoelectronics, Volume. 5, Issue 1, 73(2012)

Thermal analysis for fast thermal-response Si waveguide wrapped by SiN

Rui MIN, Ruiqiang JI, and Lin YANG*
Author Affiliations
  • Optoelectronic System Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
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    Rui MIN, Ruiqiang JI, Lin YANG. Thermal analysis for fast thermal-response Si waveguide wrapped by SiN[J]. Frontiers of Optoelectronics, 2012, 5(1): 73

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    Paper Information

    Received: Aug. 31, 2011

    Accepted: Sep. 14, 2011

    Published Online: Sep. 10, 2012

    The Author Email: Lin YANG (lyang@semi.ac.cn)

    DOI:10.1007/s12200-012-0187-8

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