High‑Quality Surface Precision Micro‑Grooving of Glass with Femtosecond Lasers Assisted by Thin Frost Layer

Yufeng Zhang; Xiaohua Zhu; Yang Liao; Jijun Feng; Wenhai Gao; Shaoming Xie; Cong Chen; Ke Liu; Yujie Peng; Yuxin Leng

doi:10.3788/CJL240806

Chinese Journal of Lasers, Volume. 52, Issue 4, 0402409(2025)

High‑Quality Surface Precision Micro‑Grooving of Glass with Femtosecond Lasers Assisted by Thin Frost Layer

Yufeng Zhang^1,2, Xiaohua Zhu³, Yang Liao^2、*, Jijun Feng¹, Wenhai Gao², Shaoming Xie², Cong Chen², Ke Liu², Yujie Peng², and Yuxin Leng^2、**

Author Affiliations

¹Shanghai Key Laboratory of Modern Optical System, School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

²State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

³Center for Ultimate Energy, ShanghaiTech University, Shanghai 201210, China

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References(34)

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Yufeng Zhang, Xiaohua Zhu, Yang Liao, Jijun Feng, Wenhai Gao, Shaoming Xie, Cong Chen, Ke Liu, Yujie Peng, Yuxin Leng. High‑Quality Surface Precision Micro‑Grooving of Glass with Femtosecond Lasers Assisted by Thin Frost Layer[J]. Chinese Journal of Lasers, 2025, 52(4): 0402409

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Paper Information

Category: Laser Micro-Nano Manufacturing

Received: Apr. 24, 2024

Accepted: May. 14, 2024

Published Online: Jan. 20, 2025

The Author Email: Liao Yang (superliao@siom.ac.cn), Leng Yuxin (lengyuxin@mail.siom.ac.cn)

DOI:10.3788/CJL240806

CSTR:32183.14.CJL240806

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology