Fig. 1. Schematic of GLCoS structure

Fig. 2. Structural design drawing of GLCoS. (a) Stereo structure of proposed model; (b) cross-sectional schematic of structure

Fig. 3. Overall flow chart of simulation

Fig. 4. Phase modulation curves with different slit numbers

Fig. 5. FP resonance at different depths of metal gratings. (a) Grating height of 80 nm; (b) grating height of 100 nm; (c) grating height of 130 nm; (d) grating height of 150 nm

Fig. 6. Influence of thickness of intermediate layer on phase in visible light range

Fig. 7. Influences of different pixel gaps. (a) Phase modulation variation of reflected light; (b) amplitude variation of reflected light

Fig. 8. Influences of grating height and width. (a) Phase modulation variation of reflected light; (b) amplitude variation of reflected light

Fig. 9. Distributions of direction vector and electric field under different pixel gaps. (a) 260 nm; (b) 280 nm; (c) 300 nm; (d) 320 nm; (e) 340 nm

Fig. 10. Device structure. (a) Schematic of device; (b) local grating SEM image

Fig. 11. Schematic of experimental setup

Fig. 12. Results of processing. (a) Interferometric fringes; (b) results of filtering

Fig. 13. Reflection phase as a function of voltage. (a) Micro-nano structure part; (b) liquid-crystal part