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Journal of Synthetic Crystals, Volume. 50, Issue 9, 1765(2021)

Magnetic Field Design and Simulation of Cylindrical Magnetron Sputtering Target

YANG Xinlei*, MI Qian, GONG Lirong, and ZHOU Fenglin
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    YANG Xinlei, MI Qian, GONG Lirong, ZHOU Fenglin. Magnetic Field Design and Simulation of Cylindrical Magnetron Sputtering Target[J]. Journal of Synthetic Crystals, 2021, 50(9): 1765

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    Paper Information

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    Received: Jun. 7, 2021

    Accepted: --

    Published Online: Nov. 8, 2021

    The Author Email: YANG Xinlei (yxlfan@sina.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology