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Acta Optica Sinica, Volume. 35, Issue 4, 431001(2015)

Accurate Determination of Optical Constants of Amorphous Absorbing Thin Films by Spectroscopic Ellipsometry

Li Jiang1,2、*, Li Pei3, Huang Feng2, Wei Xianhua1, Ge Fangfang2, and Li Peng2
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Article index updated: Mar. 10, 2025

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    Li Jiang, Li Pei, Huang Feng, Wei Xianhua, Ge Fangfang, Li Peng. Accurate Determination of Optical Constants of Amorphous Absorbing Thin Films by Spectroscopic Ellipsometry[J]. Acta Optica Sinica, 2015, 35(4): 431001

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    Paper Information

    Category: Thin Films

    Received: Oct. 29, 2014

    Accepted: --

    Published Online: Apr. 3, 2015

    The Author Email: Jiang Li (lijiang@nimte.ac.cn)

    DOI:10.3788/aos201535.0431001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology