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PhotoniX, Volume. 3, Issue 1, 25(2022)

Single-color peripheral photoinhibition lithography of nanophotonic structures

Minfei He1, Zhimin Zhang2, Chun Cao2, Yiwei Qiu2, Xiaoming Shen2, Guozun Zhou1, Zixin Cai1, Xinjie Sun1, Xin He1, Liang Xu1, Xi Liu2, Chenliang Ding2, Yaoyu Cao3, Cuifang Kuang1,2,4,5、*, and Xu Liu1,2,4、**
Author Affiliations
  • 1State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310027 Zhejiang, China
  • 2Research Center for Intelligent Chips and Devices, Zhejiang Lab, Hangzhou 311121, China
  • 3Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, Jinan University, Guangzhou, 510000 Guangdong, China
  • 4Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan, 030006 Shanxi, China
  • 5Ningbo Research Institute, Zhejiang University, Ningbo 315100, China
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    Minfei He, Zhimin Zhang, Chun Cao, Yiwei Qiu, Xiaoming Shen, Guozun Zhou, Zixin Cai, Xinjie Sun, Xin He, Liang Xu, Xi Liu, Chenliang Ding, Yaoyu Cao, Cuifang Kuang, Xu Liu. Single-color peripheral photoinhibition lithography of nanophotonic structures[J]. PhotoniX, 2022, 3(1): 25

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    Paper Information

    Category: Research Articles

    Received: Jul. 5, 2022

    Accepted: Oct. 5, 2022

    Published Online: Jul. 10, 2023

    The Author Email: Cuifang Kuang (cfkuang@zju.edu.cn), Xu Liu (liuxu@zju.edu.cn)

    DOI:10.1186/s43074-022-00072-2

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology