Optics and Precision Engineering, Volume. 17, Issue 4, 807(2009)
Design of distributed micro-area micro/nano-imprinting lithographic system
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SHEN Su, ZHOU Lei, WEI Guo-jun, CHEN Lin-sen. Design of distributed micro-area micro/nano-imprinting lithographic system[J]. Optics and Precision Engineering, 2009, 17(4): 807
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Received: Jul. 16, 2008
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: SHEN Su (shen.su@gmail.com)
CSTR:32186.14.
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