High Power Laser and Particle Beams, Volume. 36, Issue 8, 081001(2024)

Research on efficient fabrication of nanogratings by space shaping femtosecond laser

Changdong Zhao1,4, Yonggang Liu5, Wenqing Wei3,4, Hang Zhang2, Hu Deng3,4, Quancheng Liu3,4, Jianbo Hu2、*, Liping Shang3, and Zhanfeng Li1、*
Author Affiliations
  • 1School of Manufacturing Science and Engineering, Southwest University of Science and Technology, Mianyang 621010, China
  • 2Key Laboratory of Shock Wave Physics and Detonation Physics, Institute of Fluid Physics, CAEP, Mianyang 621900, China
  • 3School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, China
  • 4Tianfu Institute of Research and Innovation, Southwest University of Science and Technology, Chengdu 610299, China
  • 5State Key Laboratory of Environment-friendly Energy Materials, Southwest University of Science and Technology, Mianyang 621010, China
  • show less
    Figures & Tables(8)
    Experimental flowchart of spatial-shaped femtosecond laser direct writing
    Simulation and actual shooting results of femtosecond laser spot diffraction through slit spatial shaping.The scale bar is 10 μm
    Unshaped fs pulse spot morphology and slit-shaped fs pulse spot morphology captured using CCD and their corresponding processing results at different energy densities. The scale bar is 5 μm
    Setting the slit width at 0.50 mm and the scanning speed at 9 mm/s, CCD images of the nanograting structures on the surface of monocrystalline silicon at different laser pulse fluences are obtained. The scale bar is 10 μm
    Setting the laser energy density at 8.50 μJ/cm2 and the slit width at 0.50 mm, CCD images of the nanograting structures on the surface of monocrystalline silicon at different laser pulse scanning speeds are obtained. The scale bar is 10 μm
    Setting the laser energy density at 8.50 μJ/cm2 and the scanning speed at 9 mm/s, CCD images of the nanograting structures on the surface of monocrystalline silicon are captured at different slit widths. The scale is 10 μm
    Nanograting structures on the surface of monocrystalline silicon fabricated under optimized conditions
    Incident angle controlled diffraction by surface nanograting structures. The scale bar is 1 cm
    Tools

    Get Citation

    Copy Citation Text

    Changdong Zhao, Yonggang Liu, Wenqing Wei, Hang Zhang, Hu Deng, Quancheng Liu, Jianbo Hu, Liping Shang, Zhanfeng Li. Research on efficient fabrication of nanogratings by space shaping femtosecond laser[J]. High Power Laser and Particle Beams, 2024, 36(8): 081001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Mar. 7, 2024

    Accepted: Apr. 29, 2024

    Published Online: Aug. 8, 2024

    The Author Email: Jianbo Hu (jianbo.hu@caep.cn), Zhanfeng Li (109181294@qq.com)

    DOI:10.11884/HPLPB202436.240081

    Topics