High Power Laser and Particle Beams, Volume. 36, Issue 8, 081001(2024)
Research on efficient fabrication of nanogratings by space shaping femtosecond laser
Fig. 1. Experimental flowchart of spatial-shaped femtosecond laser direct writing
Fig. 2. Simulation and actual shooting results of femtosecond laser spot diffraction through slit spatial shaping.The scale bar is 10 μm
Fig. 3. Unshaped fs pulse spot morphology and slit-shaped fs pulse spot morphology captured using CCD and their corresponding processing results at different energy densities. The scale bar is 5 μm
Fig. 4. Setting the slit width at 0.50 mm and the scanning speed at 9 mm/s, CCD images of the nanograting structures on the surface of monocrystalline silicon at different laser pulse fluences are obtained. The scale bar is 10 μm
Fig. 5. Setting the laser energy density at 8.50 μJ/cm2 and the slit width at 0.50 mm, CCD images of the nanograting structures on the surface of monocrystalline silicon at different laser pulse scanning speeds are obtained. The scale bar is 10 μm
Fig. 6. Setting the laser energy density at 8.50 μJ/cm2 and the scanning speed at 9 mm/s, CCD images of the nanograting structures on the surface of monocrystalline silicon are captured at different slit widths. The scale is 10 μm
Fig. 7. Nanograting structures on the surface of monocrystalline silicon fabricated under optimized conditions
Fig. 8. Incident angle controlled diffraction by surface nanograting structures. The scale bar is 1 cm
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Changdong Zhao, Yonggang Liu, Wenqing Wei, Hang Zhang, Hu Deng, Quancheng Liu, Jianbo Hu, Liping Shang, Zhanfeng Li. Research on efficient fabrication of nanogratings by space shaping femtosecond laser[J]. High Power Laser and Particle Beams, 2024, 36(8): 081001
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Received: Mar. 7, 2024
Accepted: Apr. 29, 2024
Published Online: Aug. 8, 2024
The Author Email: Jianbo Hu (jianbo.hu@caep.cn), Zhanfeng Li (109181294@qq.com)