Optical Technique, Volume. 48, Issue 2, 144(2022)

2.5D Grayscale lithography hologram design and fabrication

LI Pan*, ZHENG Panpan, and LU Hong
Author Affiliations
  • [in Chinese]
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    [6] [6] Kentaro Totsu, Kenta Fujishiro, Shuji Tanaka, et al. Fabrication of three-dimensional microstructure using maskless gray-scale lithography[J]. Sensors & Actuators: A. Physical,2005,130:387-392.

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    [12] [12] Aleksandr P S, Magomed A A, Nikolay S D, et al. Experience of computer generated holograms (CGH) application for testing, alignment, and positioning of astronomical and space mirrors aspherical surfaces[C]∥Applied Optics and Photonics China,(AOPC 2019), Beijing,China,2019:113411L1-113411L8..

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    LI Pan, ZHENG Panpan, LU Hong. 2.5D Grayscale lithography hologram design and fabrication[J]. Optical Technique, 2022, 48(2): 144

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    Paper Information

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    Received: Sep. 30, 2021

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email: Pan LI (leepan@hust.edu.cn)

    DOI:

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