Fig. 1. Schematic of silicon waveguide coupling with laser

Fig. 2. Schematic of silicon edge coupler

Fig. 3. Bonding graph of grating coupler and photodetector bonding

Fig. 4. Field simulation results of edge coupler structure

Fig. 5. Topographies of deep silicon etching surface

Fig. 6. Spectra and P⁃I⁃V graph of InP based laser

Fig. 7. Change curves of detector output current with laser input current

Fig. 8. Bonding graph of laser and silicon waveguide

Fig. 9. Curves of process tolerance