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OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 21, Issue 1, 57(2023)

Simulation Research on Film Thickness Uniformity of Three-Stage Flat Planetary Fixture

ZHOU Ze-lin1, PAN Yong-qiang1, LI Qiang2, LI Dong1, ZHENG Zhi-qi1, and YANG Wei-rong1
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    ZHOU Ze-lin, PAN Yong-qiang, LI Qiang, LI Dong, ZHENG Zhi-qi, YANG Wei-rong. Simulation Research on Film Thickness Uniformity of Three-Stage Flat Planetary Fixture[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2023, 21(1): 57

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    Received: May. 23, 2022

    Accepted: --

    Published Online: Mar. 22, 2023

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    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology