Engineering Slope Measurement with Confocal Microscopy

Acta Optica Sinica, Volume. 23, Issue 4, 446(2003)

[in Chinese]^* and [in Chinese]

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[in Chinese], [in Chinese]. Engineering Slope Measurement with Confocal Microscopy[J]. Acta Optica Sinica, 2003, 23(4): 446

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Aug. 9, 2002

Accepted: --

Published Online: Jun. 27, 2006

The Author Email: (aeoluszjh@0451.com)

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