Fig. 1. Model configuration of gas circulation system of high-power excimer laser. (a) Geometry; (b) computational mesh near discharge area; (c) computational mesh near fan blade

Fig. 2. Numerical calculation results of flow field in laser chamber. (a) Global gas flow velocity distribution; (b) global absolute pressure distribution; (c) flow velocity distribution of gas between electrodes; (d) flow velocity vector diagram of gas between electrodes

Fig. 3. Simulated flow field in laser chamber with different turbulence models. (a) Global flow velocity distribution simulated using RNG k-ε model; (b) global flow velocity distribution simulated using Realizable k-ε model

Fig. 4. Gas flow velocity distribution along central axis of electrodes calculated with three different models

Fig. 5. Average gas flow velocity in discharge area and torsional moment of fan at different fan rotational speeds

Fig. 6. Average flow velocity of gas in discharge area and torsional moment of fan under different gas pressures