Infrared and Laser Engineering, Volume. 53, Issue 11, 20240435(2024)
Research on femtosecond laser micro-nano machining in the field of microrobot (invited)
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Wenwen YANG, Guoqi ZHU, Zhengjie GUAN, Yilei XU, Shengying FAN, Wei CHENG, Jincheng NI. Research on femtosecond laser micro-nano machining in the field of microrobot (invited)[J]. Infrared and Laser Engineering, 2024, 53(11): 20240435
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Received: Sep. 25, 2024
Accepted: --
Published Online: Dec. 13, 2024
The Author Email: Shengying FAN (fanshengying2022@163.com)