Optics and Precision Engineering, Volume. 16, Issue 6, 1031(2008)

Optical thin-film depositing monitoring systems with four-light beams

XU Shi-jun1,2、* and REN Xiao-ling3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    XU Shi-jun, REN Xiao-ling. Optical thin-film depositing monitoring systems with four-light beams[J]. Optics and Precision Engineering, 2008, 16(6): 1031

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    Paper Information

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    Received: Nov. 13, 2007

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: XU Shi-jun (xushijun000@sina.com)

    DOI:

    CSTR:32186.14.

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