Journal of Semiconductors, Volume. 44, Issue 6, 062804(2023)

Investigation of β-Ga2O3 thick films grown on c-plane sapphire via carbothermal reduction

Liyuan Cheng*, Hezhi Zhang*, Wenhui Zhang*, and Hongwei Liang**
Author Affiliations
  • School of Microelectronics, Dalian University of Technology, Dalian 116024, China
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    Liyuan Cheng, Hezhi Zhang, Wenhui Zhang, Hongwei Liang. Investigation of β-Ga2O3 thick films grown on c-plane sapphire via carbothermal reduction[J]. Journal of Semiconductors, 2023, 44(6): 062804

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    Paper Information

    Category: Articles

    Received: Dec. 31, 2022

    Accepted: --

    Published Online: Jul. 6, 2023

    The Author Email: Liyuan Cheng (hez.zhang@dlut.edu.cn), Hezhi Zhang (hez.zhang@dlut.edu.cn), Wenhui Zhang (hez.zhang@dlut.edu.cn), Hongwei Liang (hwliang@dlut.edu.cn)

    DOI:10.1088/1674-4926/44/6/062804

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