Contrastive Study on Laser Ablation of Single-Crystal Silicon by 1030 nm Femtosecond Laser and 355 nm Nanosecond Laser

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Yang Huan, Huang Shan, Duan Jun, Du Min. Contrastive Study on Laser Ablation of Single-Crystal Silicon by 1030 nm Femtosecond Laser and 355 nm Nanosecond Laser[J]. Chinese Journal of Lasers, 2013, 40(1): 103003

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Paper Information

Category: laser manufacturing

Received: Jul. 26, 2012

Accepted: --

Published Online: Dec. 5, 2012

The Author Email: Huan Yang (hylaser@gmail.com)

DOI:10.3788/cjl201340.0103003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology