Thin-Film Lithium Niobate-Silicon Nitride Electro-Optic Modulator Based on Embedded Filling Layer

Xiangguo Shen; Yin Xu; Yue Dong; Bo Zhang; Yi Ni

doi:10.3788/AOS222175

Acta Optica Sinica, Volume. 43, Issue 14, 1413001(2023)

Thin-Film Lithium Niobate-Silicon Nitride Electro-Optic Modulator Based on Embedded Filling Layer

Xiangguo Shen¹, Yin Xu^1,2, Yue Dong^1,2, Bo Zhang^1,2, and Yi Ni^1,2、*

Author Affiliations

¹School of Internet of Things Engineering, Jiangnan University, Wuxi 214122, Jiangsu, China

²Institute of Advanced Technology, Jiangnan University, Wuxi 214122, Jiangsu, China

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Xiangguo Shen, Yin Xu, Yue Dong, Bo Zhang, Yi Ni. Thin-Film Lithium Niobate-Silicon Nitride Electro-Optic Modulator Based on Embedded Filling Layer[J]. Acta Optica Sinica, 2023, 43(14): 1413001

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Paper Information

Category: Integrated Optics

Received: Dec. 29, 2022

Accepted: Mar. 21, 2023

Published Online: Jul. 13, 2023

The Author Email: Yi Ni (8073110160@jiangnan.edu.cn)

DOI:10.3788/AOS222175

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology