Effect of oxygen flow rate on the properties of SiOx films deposited by reactive magnetron sputtering

Fachun Lai; Ming Li; Haiqian Wang; Yousong Jiang; Yizhou Song

Chinese Optics Letters, Volume. 3, Issue 8, 08490(2005)

Fachun Lai^1,2, Ming Li¹, Haiqian Wang^1、*, Yousong Jiang³, and Yizhou Song³

¹Hefei National Laboratory for Physical Sciences at Microscale, and USTC-Shincron Joint Lab, University of Science and Technology of China, Hefei 230026

²School of Physics and Opto-Electronics Technology, Fujian Normal University, Fuzhou 350007

³Shincron Co., LTD., Shinagawa-Ku, Toyo 140-0011, Japan

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CLP Journals

[1] Zhang Shengwu, Huang Feng, Li Ming, Song Qiuming, Xie Bin, Wang Haiqian, Zhao Dongfeng, Chen Yang, Jiang Yousong, Song Yizhou. Process Control of High Reflectance Mirrors Preparation in Transition Region by Reactive Magnetron Sputtering[J]. Chinese Journal of Lasers, 2009, 36(1): 198

[2] Song Qiuming, Huang Feng, Li Ming, Xie Bin, Wang Haiqian, Jiang Yousong, Song Yizhou. Graded Refractive-Index SiOx Infrared Rugate Filter Prepared by Reactive Magnetron Sputtring[J]. Chinese Journal of Lasers, 2009, 36(8): 2144

[3] Shiyu Zhang, Quanjun Pan, Xu Fang, Kening Mao, Hui Ye, "Fabrication and characteristics of silicon-rich oxide thin films with controllable compositions," Chin. Opt. Lett. 14, 051603 (2016)

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Fachun Lai, Ming Li, Haiqian Wang, Yousong Jiang, Yizhou Song, "Effect of oxygen flow rate on the properties of SiOx films deposited by reactive magnetron sputtering," Chin. Opt. Lett. 3, 08490 (2005)

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Paper Information

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Received: Jan. 7, 2005

Accepted: --

Published Online: Jun. 6, 2006

The Author Email: Haiqian Wang (hqwang@ustc.edu.cn)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology