Optoelectronic Technology, Volume. 43, Issue 2, 173(2023)

The Research and Improvement of TFT Characteristics in TFT⁃IGZO Process

Hui ZHAO, Tao HUA, and Yanchang WANG
Author Affiliations
  • Nanjing BOE Display Technology Co.,Ltd.,Nanjing 210033, CHN
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    References(4)

    [1] Toshio Kamiya, Kenji Nomura, Hideo Hosono. Present status of amorphous In-Ga-Zn-O thin-film transistors[J]. Science and Technology of Advanced Materials, 11(2010).

    [3] Liu P T, Chou Y T, Teng F H. Ambient stability enhancement of thin-film transistor with InGaZnO capped with InGaZnO:N bilayer stack channel layers[J]. IEEE Electron Device Letters, 32, 1397-1399(2011).

    [5] Li Dongling, Shang Zhengguo, Wen Zhiyu et al. Silicon dioxide film deposited by plasma enhanced chemical vapor deposition at low temperature[J]. Nanotechnology and Precision Engineering, 11, 185-190(2013).

    [10] Cobianu C, Pavelescu C. An etch-rate study of thermally annealed LTCVD SiO2 films as a function of initial deposition conditions[J]. Journal of Materials Science Letters, 11, 979-982(1984).

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    Hui ZHAO, Tao HUA, Yanchang WANG. The Research and Improvement of TFT Characteristics in TFT⁃IGZO Process[J]. Optoelectronic Technology, 2023, 43(2): 173

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    Paper Information

    Category: Research and Trial-manufacture

    Received: Jan. 4, 2023

    Accepted: --

    Published Online: Aug. 31, 2023

    The Author Email:

    DOI:10.19453/j.cnki.1005-488x.2023.02.011

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