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Chinese Journal of Lasers, Volume. 49, Issue 21, 2104006(2022)

Nonlinear Error Compensation Method for Laser Heterodyne Interferometry Based on Continuous Wavelet Transform

Yu Wang and Hongfang Chen*
Author Affiliations
  • Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Department of Materials and Manufacturing, Beijing University of Technology, Beijing 100124, China
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    Modulus diagram of wavelet coefficient after transformation

    Fig. 1. Modulus diagram of wavelet coefficient after transformation

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    Extracted wavelet ridge

    Fig. 2. Extracted wavelet ridge

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    Experimental devices. (a) Schematic; (b) physical picture

    Fig. 3. Experimental devices. (a) Schematic; (b) physical picture

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    Spectrum diagram of interference signal when gauge block moves at 8 mm/s

    Fig. 4. Spectrum diagram of interference signal when gauge block moves at 8 mm/s

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    Nonlinear errors before and after compensation

    Fig. 5. Nonlinear errors before and after compensation

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    Yu Wang, Hongfang Chen. Nonlinear Error Compensation Method for Laser Heterodyne Interferometry Based on Continuous Wavelet Transform[J]. Chinese Journal of Lasers, 2022, 49(21): 2104006

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    Paper Information

    Category: Measurement and metrology

    Received: Dec. 14, 2021

    Accepted: Mar. 10, 2022

    Published Online: Oct. 14, 2022

    The Author Email: Chen Hongfang (chf0302@126.com)

    DOI:10.3788/CJL202249.2104006

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology