Fig. 1. Microsphere and its foil model

Fig. 2. NA cone limit of white light interferometer when measuring tilted surface

Fig. 3. Flow chart of virtual-measured inverse filtering correction method

Fig. 4. 3D STF of virtual WLI white light interferometer

Fig. 5. Cross section of bandpass filter

Fig. 6. Interference fringes and signals at fringe center before and after bandpass filtering

Fig. 7. Foil model of microsphere (x−z cross section)

Fig. 8. Spectrum of foil model (kx−kz cross section)

Fig. 9. Measured STF of WLI (kx−kz cross section)

Fig. 10. Interference fringes after different inverse filtering correction and corresponding signals at center of fringe

Fig. 11. Interference signals corresponding to different surface slopes corrected by ordinary inverse filtering

Fig. 12. Interference signals corresponding to different surface slopes corrected by virtual-measured fusion inverse filtering

Fig. 13. Topography measurement results and errors corrected by different inverse filtering