Acta Optica Sinica, Volume. 18, Issue 8, 1128(1998)

Step Heat-Forming Photoresist Method for Expanding the N. A. Range of Refractive Microlens

[in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(4)

    [1] [1] J. S. Toeppen, E. S. Bliss, T. W. Long et al.. A video Hartmann wavefront diagnostic that incorporates a monolithic microlens array. Proc. SPIE, 1991, 1544: 218~255

    [3] [3] S. Haselbeck, H. Schrelber, J. Schwider et al.. Microlenses fabricated by melting a photoresist on a base layer. Opt. Engng., 1993, 32(6): 1322~1327

    [4] [4] T. R. Jay, M. B. Stern. Preshaping photoresist for refractive microlens fabrication. Opt. Engng., 1994, 33(11): 3553~3555

    [5] [5] Z. D. Popovic, R. A. Sprague, G. A. Neville. Technique for monolithic fabrication of microlens arrays. Appl. Opt., 1988, 27(7): 1281~1284

    CLP Journals

    [1] LIU Xin, ZHANG Man, SHI Li-fang, CAO A-xiu, DENG Qi-ling. Fabrication Method for the Microlens Array of High F-number[J]. Acta Photonica Sinica, 2017, 46(2): 222004

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Step Heat-Forming Photoresist Method for Expanding the N. A. Range of Refractive Microlens[J]. Acta Optica Sinica, 1998, 18(8): 1128

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    Paper Information

    Category: Thin Films

    Received: Sep. 18, 1997

    Accepted: --

    Published Online: Oct. 18, 2006

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