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Acta Optica Sinica, Volume. 38, Issue 5, 0505003(2018)

Errors Analysis of Flat-Field Gratings Fabricated by EBL-NFH and Errors Compensation

Dakui Lin, Huoyao Chen, Zhengkun Liu, and Ying Liu*
Author Affiliations
  • National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, Anhui 230029, China
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    Article index updated: Mar. 10, 2025

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    Dakui Lin, Huoyao Chen, Zhengkun Liu, Ying Liu. Errors Analysis of Flat-Field Gratings Fabricated by EBL-NFH and Errors Compensation[J]. Acta Optica Sinica, 2018, 38(5): 0505003

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    Paper Information

    Category: Diffraction and Gratings

    Received: Oct. 26, 2017

    Accepted: --

    Published Online: Jul. 10, 2018

    The Author Email: Liu Ying (liuychch@ustc.edu.cn)

    DOI:10.3788/AOS201838.0505003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology